FEI Quanta 3D Dual Beam
Description:
This instrument has both and electron beam, for normal SEM operations, and ion beam milling and imaging samples. The e-beam column is sourced by a tungsten filament. The ion column is a gallium source. The instrument is also equipped with EDAX EDS system and TSL backscattered electron detector.
The instrument may also be used in an ESEM mode.
Quanta FIB Basic Training – Eucentric, Pt, Trenching
Quanta FIB Basic Training – xT Software
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